| Microstructural evolution during film growth I Petrov, PB Barna, L Hultman, JE Greene Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (5 …, 2003 | 2098 | 2003 |
| Size-dependent melting point depression of nanostructures: Nanocalorimetric measurements M Zhang, MY Efremov, F Schiettekatte, EA Olson, AT Kwan, SL Lai, ... Physical Review B 62 (15), 10548, 2000 | 1021 | 2000 |
| Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness U Helmersson, S Todorova, SA Barnett, JE Sundgren, LC Markert, ... Journal of Applied Physics 62 (2), 481-484, 1987 | 936 | 1987 |
| Oxidation of metastable single‐phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms D McIntyre, JE Greene, G Håkansson, JE Sundgren, WD Münz Journal of Applied Physics 67 (3), 1542-1553, 1990 | 684 | 1990 |
| Heteroepitaxial wurtzite and zinc‐blende structure GaN grown by reactive‐ion molecular‐beam epitaxy: Growth kinetics, microstructure, and properties RC Powell, NE Lee, YW Kim, JE Greene Journal of applied physics 73 (1), 189-204, 1993 | 566 | 1993 |
| Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering JE Greene, JE Sundgren, L Hultman, I Petrov, DB Bergstrom Applied physics letters 67 (20), 2928-2930, 1995 | 450 | 1995 |
| Pathways of atomistic processes on TiN(001) and (111) surfaces during film growth: an ab initio study D Gall, S Kodambaka, MA Wall, I Petrov, JE Greene Journal of Applied Physics 93 (11), 9086-9094, 2003 | 385 | 2003 |
| Microstructure modification of TiN by ion bombardment during reactive sputter deposition I Petrov, L Hultman, U Helmersson, JE Sundgren, JE Greene Thin Solid Films 169 (2), 299-314, 1989 | 372 | 1989 |
| Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017 JE Greene Journal of Vacuum Science & Technology A 35 (5), 2017 | 368 | 2017 |
| Nanoindentation studies of single‐crystal (001)‐,(011)‐, and (111)‐oriented TiN layers on MgO H Ljungcrantz, M Odén, L Hultman, JE Greene, JE Sundgren Journal of applied physics 80 (12), 6725-6733, 1996 | 293 | 1996 |
| Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure I Petrov, L Hultman, JE Sundgren, JE Greene Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10 (2 …, 1992 | 293 | 1992 |
| High‐flux low‐energy (≂ 20 eV) N+ 2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation L Hultman, JE Sundgren, JE Greene, DB Bergstrom, I Petrov Journal of Applied Physics 78 (9), 5395-5403, 1995 | 289 | 1995 |
| Temperature-dependent optical band gap of the metastable zinc-blende structure β-GaN G Ramirez-Flores, H Navarro-Contreras, A Lastras-Martinez, RC Powell, ... Physical Review B 50 (12), 8433, 1994 | 289 | 1994 |
| Average energy deposited per atom: a universal parameter for describing ion‐assisted film growth? I Petrov, F Adibi, JE Greene, L Hultman, JE Sundgren Applied physics letters 63 (1), 36-38, 1993 | 281 | 1993 |
| Crystal growth and microstructure of polycrystalline Ti1− xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering U Wahlström, L Hultman, JE Sundgren, F Adibi, I Petrov, JE Greene Thin Solid Films 235 (1-2), 62-70, 1993 | 280 | 1993 |
| Microstructure and physical properties of polycrystalline metastable Ti0. 5Al0. 5N alloys grown by dc magnetron sputter deposition G Håkansson, JE Sundgren, D McIntyre, JE Greene, WD Münz Thin solid films 153 (1-3), 55-65, 1987 | 278 | 1987 |
| Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy irradiation in determining texture, microstructure evolution, and mechanical properties D Gall, I Petrov, N Hellgren, L Hultman, JE Sundgren, JE Greene Journal of Applied Physics 84 (11), 6034-6041, 1998 | 268 | 1998 |
| Synthesis of metastable epitaxial zinc‐blende‐structure AlN by solid‐state reaction I Petrov, E Mojab, RC Powell, JE Greene, L Hultman, JE Sundgren Applied physics letters 60 (20), 2491-2493, 1992 | 266 | 1992 |
| Self-organized nanocolumnar structure in superhard TiB2 thin films PH Mayrhofer, C Mitterer, JG Wen, JE Greene, I Petrov Applied Physics Letters 86 (13), 2005 | 264 | 2005 |
| Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering BO Johansson, JE Sundgren, JE Greene, A Rockett, SA Barnett Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 3 (2 …, 1985 | 257 | 1985 |
