Smart dust: Communicating with a cubic-millimeter computer B Warneke, M Last, B Liebowitz, KSJ Pister Computer 34 (1), 44-51, 2001 | 1766 | 2001 |
Laterally actuated torsional micromirrors for large static deflection V Milanovic, M Last, KSJ Pister IEEE Photonics Technology Letters 15 (2), 245-247, 2003 | 75 | 2003 |
Torsional micromirrors with lateral actuators V Milanović, M Last, KSJ Pister Transducers’ 01 Eurosensors XV: The 11th International Conference on Solid …, 2001 | 70 | 2001 |
Capacitive sense feedback control for MEMS beam steering mirrors B Cagdaser, A Jog, M Last, BS Leibowitz, L Zhou, E Shelton, KSJ Pister, ... Proc. of Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head …, 2004 | 48 | 2004 |
Out of plane motion of assembled microstructures using a single-mask SOI process M Last, V Subramaniam, KSJ Pister The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 42 | 2005 |
2-DOF actuated micromirror designed for large DC deflection M Last, KSJ Pister Proc. 3rd Int’l Conf. Micro Opto Electro Mechanical Systems 99, 239-243, 1999 | 35 | 1999 |
Practical techniques for measuring MEMS properties JV Clark, D Garmire, M Last, J Demmel, S Govindjee Proceedings of the Nanotechnology Conference and Trade Show (NSTI’04) 1, 402-405, 2004 | 30 | 2004 |
Toward a wireless optical communication link between two small unmanned aerial vehicles M Last, BS Leibowitz, B Cagdaser, A Jog, L Zhou, B Boser, KSJ Pister Proceedings of the 2003 International Symposium on Circuits and Systems …, 2003 | 29 | 2003 |
Two-axis scanning mirror for free-space optical communication between UAVs L Zhou, M Last, V Milanovic, JM Kahn, KSJ Pister 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No. 03EX682 …, 2003 | 28 | 2003 |
Monolithic silicon micromirrors with large scanning angle V Milanovic, M Last, KSJ Pister Optical MEMS 1, 2001 | 26 | 2001 |
Deep reactive ion etching for lateral field emission devices V Milanovic, L Doherty, DA Teasdale, C Zhang, S Parsa, V Nguyen, ... IEEE electron device letters 21 (6), 271-273, 2000 | 19 | 2000 |
Sensor array package L Huang, SJ Hong, RE Kauffman, TT JIANG US Patent 8,981,578, 2015 | 17 | 2015 |
Sensor array package SX ARNOLD, TL Gilton US Patent 8,736,080, 2014 | 16 | 2014 |
Optical switch module E Korevaar, Y Taketomi, T Barrott, H Tigli, M Last, L Dirvscio, E Davis US Patent 7,734,127, 2010 | 16 | 2010 |
Silicon-on-Insulator Microassembly ME Last dissertation talk Dec. 2005 (40 pages), 0 | 14 | |
Mems mirror array and controls L DiRuscio, E Davis, M Last US Patent 7,386,201, 2008 | 13 | 2008 |
Video semaphore decoding for free-space optical communication M Last, B Fisher, C Ezekwe, SM Hubert, S Patel, S Hollar, BS Leibowitz, ... Real-time imaging V 4303, 148-158, 2001 | 12 | 2001 |
Optical fiber array alignment unit M Last, Y Taketomi US Patent 7,548,682, 2009 | 9 | 2009 |
Process for fabricating MEMS devices J Gritters, EJJ Kruglick, M Last US Patent 8,691,099, 2014 | 8 | 2014 |
An 8 mm/sup 3/digitally steered laser beam transmitter M Last 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No. 00EX399 …, 2000 | 8 | 2000 |